ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Reference number
ISO 14644-10:2013
Edición 1
2013-03
© ISO 2024
Retirada
Retirada (Edición 1, 2013)

Resumen

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Informaciones generales

  • Estado
     : Retirada
    Fecha de publicación
     : 2013-03
    Etapa
    : Retirada de la Norma Internacional [95.99]
  • Edición
     : 1
    Número de páginas
     : 30
  • Comité Técnico :
    ISO/TC 209
    ICS :
    13.040.35 
  • RSS actualizaciones

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