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Standard and/or project under the direct responsibility of ISO/TC 202/SC 4 Secretariat | Stage | ICS |
---|---|---|
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification |
95.99 | |
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification |
90.60 | |
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements |
60.60 | |
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM |
60.60 | |
Microbeam analysis — A Guideline for Long Period Analysis Using SEM-EDS |
20.98 |
|
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness |
90.60 |
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