ISO 20341:2003

Published (Edition 1, 2003)

This publication was last reviewed and confirmed in 2019. Therefore this version remains current.

ISO 20341:2003

CHF 43

Convert Swiss francs (CHF) to your currency

Abstract

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.