International Standard
ISO 18114:2021
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Reference number
ISO 18114:2021
Edition 2
2021-05
International Standard
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ISO 18114:2021
80189
Published (Edition 2, 2021)

ISO 18114:2021

ISO 18114:2021
80189
Language
Format
CHF 42
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Abstract

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

General information

  •  : Published
     : 2021-05
    : International Standard published [60.60]
  •  : 2
     : 4
  • ISO/TC 201/SC 6
    71.040.40 
  • RSS updates

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