Abstract

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ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.


General information 

  • Status
     : Published
    Publication date
     : 2016-08
  • Edition
     : 2
    Number of pages
     : 18
  • Technical Committee
     : ISO/TC 202/SC 4 Scanning electron microscopy
  • ICS
     :
    37.020 Optical equipment

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