This document gives how to diagnose whether the mole fraction of a binary organic mixture of interest can be determined by the relative sensitivity factor method (RSF) or modified RSF methods of secondary ion mass spectrometry (SIMS) within the uncertainty and the range of the mole fraction required by users. This document is specified in the cases when using massive cluster ion, e.g. GCIB (Ar cluster, water cluster etc.) or C60+ as primary ion ion dose is within the intensities do not change during analyses, or when using other ion, e.g. Bi3+, Au3+ or Ga+, ion dose is within the static limit. Whether the mole fraction of interest can be determined is assessed by analyzing reference materials manufactured in the same way as the analyte and evenly distributed in lateral and depth directions.
Status: Under development
Technical Committee: ISO/TC 201/SC 6 Secondary ion mass spectrometry
- ICS :
This standard contributes to the following Sustainable Development Goal:
ISO/AWI 4245Stage: 20.00
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