This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
Status: PublishedPublication date: 2022-04
Edition: 1Number of pages: 15
Technical Committee: ISO/TC 201/SC 6 Secondary ion mass spectrometry
- ICS :
- 71.040.40 Chemical analysis
This standard contributes to the following Sustainable Development Goals:
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ISO/TS 22933:2022Stage: 60.60
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